The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 1992
Filed:
Sep. 18, 1991
Applicant:
Inventors:
Nobutaka Kikuiri, Tokyo, JP;
Norio Uchida, Kanagawa, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kanagawa, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03B / ;
U.S. Cl.
CPC ...
355 73 ; 355 53 ; 355 76 ;
Abstract
A carrier apparatus for carrying a plane member such as a semiconductor wafer, a mask for exposure, a optical disk substrate, a liquid crystal panel and so on. To hold such a flat member tightly, the carrier apparatus comprises an elastic member between a holding part and a carrier arm.