The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 1992
Filed:
May. 02, 1991
Applicant:
Inventor:
Masashi Iwatsuki, Mizuhomachi, JP;
Assignee:
Jeol Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250306 ; 25044211 ; 310328 ;
Abstract
A scanning probe microscope having a tip, scanning piezoelectric units for causing the tip to scan and even-numbered z-movement piezoelectric elements for moving the tip along the z-axis. The electrodes at the outer faces of the z-movement piezoelectric elements are grounded. Thus, no AC coupling occurs between the tip and the z-axis electrode opposite to the tip. Introduction of noises into the resulting tunnel current is prevented and the image quality of the sample image is greatly improved.