The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 1992
Filed:
Apr. 30, 1991
Applicant:
Inventor:
Susumu Tanaka, Hachioji, JP;
Assignee:
Tokyo Electron Sagami Limited, Kanagawa, JP;
Primary Examiner:
Int. Cl.
CPC ...
H05B / ;
U.S. Cl.
CPC ...
219390 ; 118725 ; 219411 ;
Abstract
A heating apparatus comprising a refractory block in which coil heater is embedded, an inner metal cover located outside the refractory block, a water cooling pipe located outside the inner cover, an outer metal cover located outside the water cooling pipe, a terminal electrically connected to end of the coil heater and passed through the inner and outer covers, and a power supply electrically connected to the terminals to supply current to the coil heaters. Each of the terminals is fixed to the outer cover by insulating members but left free from the inner cover.