The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 1992
Filed:
Feb. 15, 1990
Hidemi Sato, Yokohama, JP;
Yasuo Hira, Yokohama, JP;
Atsuko Fukushima, Yokohama, JP;
Hiroshi Asao, Yokohama, JP;
Kazumi Kawamoto, Yokohama, JP;
Kenchi Ito, Yokohama, JP;
Ryuichi Funatsu, Yokohama, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A sample is located so as to be close to a prism and a light beam coming from a light source is projected to the prism while varying the incident angle to the prism as a parameter. The incident light beam to the prism is propagated therein and light emerging from the bottom surface of the prism, which is in contact with the sample, is projected to the sample. At the same time the intensity of light reflected by the bottom surface of the prism is measured. Optical constants such as the refractive index, the film thickness, the distribution of the refractive index, etc. are obtained by calculation, starting from measured values thus obtained.