The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 1992

Filed:

Nov. 26, 1990
Applicant:
Inventor:

David R Clark, Garland, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
357 236 ; 357 234 ; 357 59 ; 357 68 ; 357 45 ;
Abstract

A method and apparatus is provided for allowing access to a buried wordline conductor (38) of a dynamic random access memory cell array. A selected memory cell is used as a wordline connection cell (47). A local oxide layer (43) is used during the etchant process which is used to form wordline conductors (38). The oxide layer (43) functions as a mask to create a wordline connection body (45). During the formation of the bitline conductors (42), a wordline contact (49) may be similarly formed to provide access to the wordline conductors (38). The wordline connection cell (47) provides efficient access to the wordline conductors (38) and uses only the substrate surface area occupied by a single memory cell.


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