The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 1992
Filed:
Apr. 24, 1990
Applicant:
Inventors:
Eugene E Haller, Berkeley, CA (US);
Marvin L Cohen, Berkeley, CA (US);
William L Hansen, Walnut Creek, CA (US);
Assignee:
The Regents of the University of California, Berkeley, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B32B / ; B32B / ; C23C / ;
U.S. Cl.
CPC ...
428408 ; 20419215 ; 20419216 ; 20419222 ; 423384 ; 428446 ; 428469 ; 428698 ; 428699 ; 428700 ; 428704 ;
Abstract
Novel crystalline .alpha. (silicon nitride-like)-carbon nitride and .beta. (silicon nitride-like)-carbon nitride are formed by sputtering carbon in the presence of a nitrogen atmosphere onto a single crystal germanium or silicon, respectively, substrate.