The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 1992
Filed:
Apr. 16, 1990
Applicant:
Inventors:
Keizo Suzuki, Kodaira, JP;
Susumu Hiraoka, Kokubunji, JP;
Tatsumi Mizutani, Koganei, JP;
Shigeru Nishimatsu, Kokubunji, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D / ; B44C / ;
U.S. Cl.
CPC ...
427 38 ; 427 35 ; 427 531 ; 427 541 ; 156643 ; 156646 ; 156662 ; 156664 ;
Abstract
Disclosed are a surface treatment method and apparatus in which an active species beam that contains active species having translational energy in a range of 0.01-100 eV as at least a partial constituent thereof constructs at least a part of treatment means.