The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 1992

Filed:

Apr. 15, 1991
Applicant:
Inventors:

Tadashi Nishioka, Itami, JP;

Takao Yasue, Itami, JP;

Hiroshi Koyama, Itami, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250306 ; 73105 ;
Abstract

A fine scanning mechanism for an atomic force microscope includes a three-dimensionally displaceable cylindrical piezolectric element, a first probe attaching portion attached to an end of the said cylindrical piezoelectric element, a first probe attached to the first probe attaching portion, a bimorph piezoelectric element attaching portion attached to the end of the cylindrical piezoelectric element, a one-dimensionally displaceable bimorph piezoelectric element attached to the bimorph piezoelectric element attaching portion, a cantilever attaching portion attached to a side of the one-dimensionally displaceable bimorph piezoelectric element, the cantilever having a displacement portion and being attached to the cantilever attaching portion, a second probe attaching portion attached to a side of the displacement portion of the cantilever, a second probe attached to the second probe attaching portion, and a stationary sample tray disposed opposite the second probe.


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