The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 1992
Filed:
May. 25, 1989
Nir Karasikov, Haifa, IL;
Yoel Ilssar, Haifa, IL;
Galai Laboratories Ltd., Migdal Haemek, IL;
Abstract
A system for the semiautomatic inspection of printed circuits on silicon wafers and other similar micro-electronic products which comprises in combination a floating table supporting a robot arm which has the function of grabbing a single wafer from a cassette in which it is housed, inverting same, or assuming a position with its axis defining the Y-axis of the scanning system, and of moving in this direction; and of placing after inspection such wafer in another cassette according to the grade it received; an optical inspection device, such as optical microscope combined with a TV camera or the like attached to said same table, said microscope being adapted to move in the direction of the X-coordinate of the inspection system, there being provided means for aligning the direction of the printed circuit with the X-Y coordinates of the scanning system. A sophisticated optoscanner system is used for the alignment of the wafer and for establishing its exact position. The wafer is held by a vacuum gripper from the moment of its removal from the first cassette and up to its insertion into another one.