The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 1992
Filed:
Dec. 20, 1990
Annie Tissier, Saint Ismier, FR;
Jean Galvier, Saint Martin d'Heres, FR;
French State, Minister of Post, Telecommunications and Space, Issy les Moulineaux, FR;
Abstract
A process for measuring the dimensions of a spacer consisting in forming in a substrate (1) an array of parallel stripes (2), having a rectangular cross section; forming spacers (7) on the lateral edges (6) of the parallel stripes (2); lighting the array through a monochromatic light beam to supply a diffraction pattern, the envelope of which exhibits a major lobe and secondary lobes; measuring the sum of light intensities of a predetermined number of spots pertaining to the first secondary lobe; and deducting therefrom the width l and angle .theta. of the spacer (7) according to the following formulas: