The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 1992
Filed:
Dec. 21, 1990
Josef Winnerl, Landshut, DE;
Franz Neppl, Munich, DE;
Siemens Aktiengesellschaft, Munich, DE;
Abstract
An integrated circuit containing bipolar and complementary MOS transistors wherein the base and emitter terminals of the bipolar transistor, as well as the gate electrodes of the MOS transistors, are composed of a silicide or of a double layer polysilicon silicide. The base and emitter terminals, as well as the gate electrodes, are arranged in one level of the circuit and there p.sup.+ doping or, respectively, n.sup.+ doping proceeds by ion implantation in the manufacture of the source/drain zones of the MOS transistors. As a result of the alignment independent spacing between the emitter and the base contact, the base series resistance is kept low and a reduction of the space requirement is achieved. Smaller emitter widths are possible by employing the polycide or silicide as diffusion source and as the terminal for the emitter. The size of the bipolar transistor is not limited by the metallization grid, since the silicide terminals can be contacted via the field oxide. The integrated semiconductor circuit is employed in VLSI circuits having high switching speeds.