The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 1992
Filed:
Jun. 05, 1990
Josef Frohn, Herzogenrath, DE;
Harald Ibach, Aachen-Verlautenheide, DE;
Forschungszentrum Juelich GmbH, Juelich, DE;
Abstract
A scanning tunnel microscope having an emission tip, specimen holder and xyz movement mechanism as well as devices for applying a voltage between the emission tip and the specimen and for detecting the electrons emanating from the specimen can be used for verifying secondary electrons generated in the same surface region and/or an energy analysis of electrons emitted by the emission tip and scattered by the surface if a cylindrical mirror analyzer with assigned detector is arranged coaxially to the emission tip. With relatively high applied voltages, a cylindrically symmetrical correction electrode between the emission tip and the cylindrical mirror, arranged coaxially to the emission tip, is expedient, with which electrode the imaging properties of the analyzer open toward the specimen are made to approximate those of a conventional cylindrical mirror. A masking device allows a solid angle-oriented detection of scattered and secondary electrons. The outer cylinder of the cylindrical mirror may, at least in part, be made transmissive to photons, which are verified by a detector arranged on the outside. A channel multiplier plate with a fluorescent screen, provided opposite the emissions tip, allows detection of structural and/or emission properties of the emission tip by field ion microscopy or field electron microscopy.