The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 1992

Filed:

Jan. 29, 1991
Applicant:
Inventor:

Yoichi Mori, Fujisawa, JP;

Assignees:

Ebara Corporation, Tokyo, JP;

Ebara Research Co., Ltd., Fujisawa, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D / ; C01D / ;
U.S. Cl.
CPC ...
4252 / ; 423210 ; 423241 ; 55 71 ;
Abstract

Waste gases containing ClF.sub.3 are treated by bringing them into contact with iron oxide substantially composed of a ferric oxide (Fe.sub.2 O.sub.3) at a linear velocity of about 10-200 cm/min at ordinary temperatures, or further into contact with an alkali agent at the same linear velocity and temperatures as the above, whereby the content of ClF.sub.3 can be reduced below the permissible level despite simultaneous emission of acidic gases, and yet which is capable of removing the concomitant acidic gases in an effective manner.


Find Patent Forward Citations

Loading…