The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 1992
Filed:
Apr. 10, 1990
Hans A Gerber, Burghausen, DE;
Georg Hochgesang, Burghausen, DE;
Alfred Pardubitzki, Burghausen, DE;
Manfred Schmiedlindl, Burgkirchen, DE;
Werner Zipf, Toging, DE;
Arthur Schweighofer, Burghausen, DE;
Wacker-Chemitronic Gesellschaft fur Elektronic-Grundstoffe mbH, Burghausen, DE;
Abstract
A wafer holding device including a frame (2) which surrounds a wafer (1) ch is received without contact, which can be moved with the wafer having at least three holding elements (3) which are directed toward the outside circumference of the wafer and which can be changed from a holding position to a release position. The wafer can be supported in the holding device during many steps associated with movement in the production process so that a multiplicity of gripping and release operations which stress the wafer surface are unnecessary.