The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 1992
Filed:
Mar. 22, 1991
Applicant:
Inventor:
Donald L White, Lake Parsippany, NJ (US);
Assignee:
AT&T Bell Laboratories, Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ; G02B / ;
U.S. Cl.
CPC ...
385-1 ; 385-3 ; 385-4 ;
Abstract
Imaging at sub-micron dimensions--at dimensions ordinarily thought to approximate those within diffraction limitations of the chosen imaging radiation--is expedited by use of a new category of phase masks. The new mask structure provides for phase shifting by use of waveguides. Waveguides of such dimensions, material, and spacing as to accommodate image resolution impairment, may consist of filled or unfilled apertures or of protuberances, all of constant length equal to the thickness of the mask layer in which constructed.