The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 1992
Filed:
Mar. 16, 1988
Applicant:
Inventor:
Clarence W Teng, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437225 ; 437235 ; 437238 ; 437233 ; 156643 ; 156644 ; 156652 ; 156653 ;
Abstract
Contact etching is simplified by including a conformal etch stop layer underneath the interlevel or multilevel oxide (MLO). Etching through the unequal thickness of the MLO with sufficient overetching to reliably clear the thickest parts of the MLO layer will therefore not damage the silicon contact areas underneath the thinner parts of the MLO. Process control is also improved. Preferably this conformal etch stop layer is a conductor, and is grounded to configure a field plate over the entire surface of the chip.