The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 1992
Filed:
Jul. 24, 1990
Applicant:
Inventors:
Philippe Chantraine, Neuilly-Sur-Seine, FR;
Marta Zorrilla, Fontenay-Le-Fleury, FR;
Assignee:
Bull S.A., Paris, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B / ; B44C / ;
U.S. Cl.
CPC ...
428209 ; 156643 ; 156655 ; 156668 ; 156902 ; 428137 ;
Abstract
A method for deposition of an insulating layer on a conductive layer of the multi layer structure of a connection board of a VLSI circuit and a connection board formed by the method. The formation of an insulating layer coplanar with the upper surface of the vias (21) of the conductive layer (16a, 16b) is done by etching of an insulating layer (26) formed of a plurality of successive strata (22, 23, 24, 25) until a surface is obtained that has steps of a maximum height (S4) substantially equal to or less than a desired valve (V) corresponding to the desired degree of planarity of the final insulating layer.