The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 1992
Filed:
Mar. 12, 1990
Tsugio Takase, Hachioji, JP;
Hideo Adachi, Iruma, JP;
Takao Okada, Hachioji, JP;
Hisanari Shimazu, Akishima, JP;
Hideo Tomabechi, Higashiyamato, JP;
Hiroshi Kajimura, Tokyo, JP;
Olympus Optical Co., Ltd., Tokyo, JP;
Abstract
A sensor comprises a tiny cantilever of a thin film having a detection region at its free end portion, a detector for detecting a displacement of the cantilever caused by material acting on the detecting region, and calculation unit for calculating an amount of the material acting on the detection region, based on the displacement of the cantilever which has been detected by the detector, thereby to measure the intensity of a particle-stream applied to the detection region or the thickness of a film formed on the detection region.