The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 1991

Filed:

Jul. 20, 1990
Applicant:
Inventors:

Fuminori Hayano, Yokohama, JP;

Sunao Murata, Kanagawa, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250572 ; 250226 ; 356237 ;
Abstract

A defect inspecting apparatus for discriminating one of two surfaces of a flat transparent object such as a pericle. The flat object is irradiated with a beam of light which is supplied from a light source and which is multiple-color light having predetermined wavelength ranges or white light of a broad band, scattered light from the defect is received by an optical element having wavelength selectivity, and scattered lights thereby separated with respect to the particular wavelength ranges are photoelectrically detected. The intensities of photoelectric signals thereby obtained are compared with each other.


Find Patent Forward Citations

Hayano, Fuminori. (1991). Defect inspecting apparatus using multiple color light to detect defects (U.S. Patent No. 5072128). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5072128

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…