The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 1991

Filed:

Apr. 17, 1989
Applicant:
Inventors:

Kenneth P Rodbell, Poughkeepsie, NY (US);

Paul A Totta, Poughkeepsie, NY (US);

James F White, Newburgh, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B32B / ; C23C / ; C23C / ;
U.S. Cl.
CPC ...
428620 ; 428651 ; 20419217 ; 357 71 ;
Abstract

A sputtered low copper concentration multilayered, device interconnect metallurgy structure is disclosed herein. The interconnect metallization structure comprises a sputtered aluminum-copper (<2) weight percent copper conductor. In the preferred embodiment, the AlCu conductor has formed on one or both of its surfaces a layer of an intermetallic compound formed from a Group IVA metal and aluminum. The Group IVA metal is deposited by sputtering. Optionally, onto said top intermetallic layer is further deposited a non-reflective, non-corrosive, etch-stop, capping layer.


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