The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 1991
Filed:
Sep. 18, 1989
Applicant:
Inventor:
Robert F Rogler, Rehoboth, MA (US);
Assignee:
OCG Microelectronic Materials, Inc., Cheshire, CT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ; G03F / ; G03F / ;
U.S. Cl.
CPC ...
430168 ; 430165 ; 430191 ; 430192 ; 430193 ; 430309 ; 430326 ; 430331 ;
Abstract
The process of developing an image-wise exposed positive-working photoresist-coated substrate comprising the steps of: