The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 1991
Filed:
Jul. 05, 1990
Applicant:
Inventors:
Yoshiyuki Kobayashi, Ube, JP;
Takashi Suehaga, Yamaguchi, JP;
Isamu Mouri, Ube, JP;
Tukasa Fujii, Ube, JP;
Assignee:
Central Glass Company, Limited, Ube, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134 37 ; 134 21 ; 134 30 ; 156646 ; 423460 ;
Abstract
Carbon members contaminated with deposits of metals and/or metal compounds such as nitrides or carbides are thoroughly cleaned with little adverse influences on the carbon members themselves by treating the contaminated carbon members with a cleaning gas consisting of 1-20 vol % of CIF.sub.3 gas and the balance of an inactive diluent gas at a temperature in the range from 200.degree. to 300.degree. C. For example, this cleaning method is applicable to graphite parts of apparatus for forming thin films in the manufacture of semiconductor devices.