The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 1991
Filed:
Sep. 24, 1990
Applicant:
Inventors:
Stephen P Rogers, Mesa, AZ (US);
Michael S Lebby, Chandler, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ; C23F / ;
U.S. Cl.
CPC ...
156643 ; 156646 ; 156656 ; 156657 ; 156662 ; 156665 ; 20419235 ; 20419237 ; 437234 ; 437245 ;
Abstract
A method for plasma etching semiconducting composed of III-V and related materials is provided. Enhanced removal rates, greater volatility, and reduced etch initiation time is provided by exposing the semiconductor to a plasma of methane, hydrogen, and at least one of trialkylboron, trimethylboron, or triethylboron.
Quick Actions:
Rogers, Stephen. (1991). Etching of materials in a noncorrosive environment (U.S. Patent No. 5068007). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5068007
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile