The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 22, 1991

Filed:

Sep. 28, 1990
Applicant:
Inventors:

Uri Cohen, Palo Alto, CA (US);

Wei C Hsie, Eden Prairie, MN (US);

Assignee:

Seagate Technology, Scotts Valley, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; C23F / ;
U.S. Cl.
CPC ...
156643 ; 29603 ; 156656 ; 1566591 ; 360123 ;
Abstract

The seed-layer, or metallization layer, used to form the coil winding in a thin film head (TFH) by electrodeposition, is removed from between individual winding turns by selective etching with an etchant which preferentially, or selectively, attacks the seed-layer while leaving the coil winding, insulation, and gap materials essentially intact. A suitable combination of compatible materials which can be used as the seed-layer, coil winding, and etchant, respectively, in practicing this invention comprises nickel-iron Permalloy, copper, and a mixture of nitric acid and phosphoric acid diluted in pure water. Other combinations of materials and types of etching processes suitable for this invention are also disclosed.


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