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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 5051594 B1

PDFFull Text
Date of Patent:
Sep. 24, 1991

Filed:

Jun. 12, 1990

Fine positioning device, as for the stage of a scanning tunneling

Applicant:
Inventors:

Nobuhiro Tsuda, Tsukuba, JP;

Hirofumi Yamada, Tsukuba, JP;

Fumihiko Ishida, Kawasaki, JP;

Masayuki Miyashita, Warabi, JP;

Assignees:

Japan Ministry of International Trade and Industry, Tokyo, JP;

Toshiba Corporation, Kanagawa, JP;

Nikon Corporation, Tokyo, JP;

Attorney:

Shapiro and Shapiro

Primary Examiner:

Bruce C Anderson

Int. Cl.
CPC ...
G21K / ;
U.S. Cl.
CPC ...
2504421 ; 2504401 ;
Abstract

A fine positioning device such as a stage device for placing a probe or a sample thereon in a scanning tunneling microscope comprises a fixed member, a first structure spring stage having a first base member integral with the fixed member, a first moving member and a first resilient member for resiliently coupling the first base member and the first moving member such that they are displaceable relative to each other in a predetermined direction, a first actuator for displacing the first moving member relative to the base member in the predetermined direction, a second structure spring stage having a second base member integral with the first moving member, a second moving member and a second resilient member for resilient coupling the second base member and the second moving member such that they are displaceable relative to each other in a direction parallel to the predetermined direction, and a second actuator for displacing the second moving member relative to the second base member in the parallel direction.

Find Patent Forward Citations

Tsuda, Nobuhiro. (1991). Fine positioning device, as for the stage of a scanning tunneling (U.S. Patent No. 5051594). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5051594

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