The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 1991
Filed:
Apr. 06, 1989
Applicant:
Inventors:
Assignee:
Rikagaku Kenkyusho, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01K / ;
U.S. Cl.
CPC ...
364557 ; 374163 ;
Abstract
Apparatus for measuring the electron temperature of plasma includes a first probe which is inserted in the plasma to detect the floating potential. Two sequentially generated pulses of distinct voltages are added to the detected floating potential and these summed voltages are then sequentially applied to the plasma via a second probe. The current in the second probe is detected and the electron temperature is then calculated from the values of the voltage pulses and the currents detected by the second probe.