The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 1991
Filed:
May. 04, 1990
Applicant:
Inventor:
Robert J Hillard, Avalon, PA (US);
Assignee:
Solid State Measurements, Inc., Pittsburgh, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324719 ; 3241 / ;
Abstract
An apparatus and method for measurement of electrical properties of a dielectric layer on a semiconductor wafer body is disclosed. The apparatus supports the semiconductor wafer body in position and two electrical contacts are utilized, one of which is a probe tip having a uniformly flat contact portion. Means are provided for establishing a planar contact between the flat contact portion of the probe tip and the dielectric layer of the semiconductor wafer. Measurements of the electrical properties of the dielectric layer can then be made without the use of patterned mesas.