The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 1991
Filed:
Dec. 21, 1988
Applicant:
Inventors:
Atsuhiko Hiai, Takaishi, JP;
Kazuo Wakimura, Sennan, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
4272481 ; 34 22 ; 118726 ;
Abstract
Supply equipment for providing a stable supply of feed gas of an organic metal compound at a constant concentration comprises a cylindrical vessel with an organic metal compound housed, an inlet tube of carrier gas for vaporizing said organic metal compound, an outlet tube for letting out the carrier gas substantially saturated with the vaporized organic metal compound, a room provided in the lower part of the vessel which is connected to said carrier gas inlet tube, a packed bed of an organic metal compound formed above said room, and a partition with a plurarity of pores partitioning said room and said packed bed.