The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 1991
Filed:
Jul. 30, 1990
Isao Kobayashi, Kofu, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A handling apparatus comprises a holding member for holding an object to be handled, a driving member for driving the holding member, a locus detection section provided in a fixed position which is not driven by the driving member, the locus detection section representing a locus along which the holding member is to move, and a sensor, provided on said holding member, for detecting the locus. The locus of the holding member is constantly detected by the sensor during the operation of the holding member, and, when the holding member is displaced from a predetermined locus, the operation of the handling apparatus is suddenly stopped. Then, the holding member is moved to a position where the locus detection section can be detected by the sensor, and the holding member is restored to an initial position.