The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 1991
Filed:
Sep. 19, 1990
Applicant:
Inventors:
Yoichi Murayama, Shinsuku-ku, Tokyo, 161, JP;
Tetsuya Nomachi, Kyoto, JP;
Assignees:
Tobi Col, Ltd., Osaka, JP;
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ;
U.S. Cl.
CPC ...
2041921 ; 20419214 ; 20419229 ; 20429805 ; 427 40 ;
Abstract
A conductive thin film is deposited on the surface of plastic film moving at high velocity by ion-plating using a pressure-gradient discharge. The moving velocity of the substrate film is as high as 8 to 30m/min. A conductive, thin film composed of indium oxide, tin oxide, TTD and similar substances is deposited on the plastic film, at a pressure of 1.times.10.sup.-5 to 1.times.10.sup.-1 Torr and a discharge voltage of 50 to 100 V.