The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 1991
Filed:
Apr. 20, 1988
Yasuhiro Ikeda, Annaka, JP;
Shin-Etsu Handotai Co., Ltd., Tokyo, JP;
Abstract
According to this invention, a semiconductor rod zone melting apparatus for manufacturing single-crystal semiconductor such as silicon, germanium, and the like and compound semiconductors such as gallium phosphate, and the like by the FZ process is disclosed. In this invention, a substantially U-shaped metal piece is arranged near one of upper and lower side surfaces of an induction heating coil surrounding a floating zone of a semiconductor rod to be melted, the floating zone surrounding space can be varied upon relative movement between the coil and the metal piece toward the radial direction of the coil. The floating zone of the semiconductor rod can be homogeneously and concentratively heated, and zone melting of a large-diameter semiconductor rod is facilitated.