The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 1991
Filed:
Jun. 23, 1989
Applicant:
Inventors:
Bernard Bouyer, Grenoble, FR;
Bernard Andries, Thones, FR;
Guillaume Ravel, Annecy, FR;
Louise Peccoud, Claix, FR;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324649 ; 324459 ; 324615 ; 324711 ; 324629 ; 422186 ; 20429803 ;
Abstract
A method and apparatus for determining the impedance of the discharge in a plasma reactor system comprising a tuning box having variable capacitors is described. The impedance of the discharge is determined in dependence on a pre-established relationship between the operational positions of the variable capacitors on the one hand and the impedance of the discharge on the other. The ionic current relative to the discharge in the reactor also may be determined by taking into account the high frequency voltage of the reactor.