The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 1991
Filed:
Feb. 17, 1989
Applicant:
Inventor:
Wataru Karasawa, Yokohama, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
3241 / ; 324 731 ;
Abstract
This invention relates to a method and apparatus for performing a probing test for sequentially testing chips formed on a semiconductor wafer in a matrix form. An area of a chip subjected to the test or a chip excluded from the test on the wafer is preset, the preset-area information is stored, and only chips subjected to to the test are tested on the basis of the sequentially readout preset-area information.