The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 1991
Filed:
Jan. 29, 1990
Applicant:
Inventors:
Richard F Foulke, Carlisle, MA (US);
Steven M Lord, Malden, MA (US);
Assignee:
Proconics International, Inc., Wilmington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G / ;
U.S. Cl.
CPC ...
414416 ; 294 641 ; 414627 ; 414786 ;
Abstract
Wafer transfer apparatus including a wafer-pickup element having suction openings closer to the edge of wafer than the wafer's center so that the wafer can be picked up with greater certainty as to the locations of the wafer edges, the openings being surrounded by raised portions so that the region of the wafer-pickup element between the opening is at a lower elevation than the raised portions so as to facilitate picking up warped wafers.