The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 25, 1990

Filed:

Mar. 09, 1989
Applicant:
Inventors:

Ekkehard Bartmann, Erzhausen, DE;

Rudolf Klug, Aschaffenburg, DE;

Reinhard Schulz, Reinheim, DE;

Hartmut Hartner, Muhltal, DE;

Assignee:

Ciba-Geigy Corporation, Ardsley, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F / ; G03C / ;
U.S. Cl.
CPC ...
430283 ; 430270 ; 430281 ; 430330 ; 430921 ; 430927 ; 522 59 ;
Abstract

The invention relates to negative photoresists of the polyimide type essentially containing, in an organic solvent, in each case at least


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