The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 1990
Filed:
Apr. 03, 1987
Agerico L Esquivel, Dallas, TX (US);
Allan T Mitchell, Garland, TX (US);
Other;
Abstract
A method and apparatus for providing interconnections between levels on a semiconductor substrate of various types includes first forming a plurality of trenches in the substrate and then forming conductive layers at the bottom of the trenches. The trenches are then filled with an oxide to provide a planar surface on the substrate. Various levels of trenches are provided with crossovers being formed by a bridging layer of a conductive material that is formed over an oxide layer in the lower level trenches. Vertical contacts are formed by etching an opening from the surface to the bottom of the trenches through the oxide layer and filling the opening with a metal plug.