The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 1990
Filed:
Sep. 26, 1989
Applicant:
Inventors:
Helmut Rinck, Langenbach, DE;
Helmut Endl, Freising, DE;
Assignee:
Texas Instruments Deutschland GmbH, Freising, DE;
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; C23F / ; C03C / ; H01L / ;
U.S. Cl.
CPC ...
156627 ; 156639 ; 156656 ; 1566591 ; 156665 ; 156666 ; 156902 ; 156662 ; 156345 ;
Abstract
In the etching by means of an etching solution of an electrically conductive layer applied to a substrate the time profile or variation of the diffusion current flowing between the layer to be etched away and the etching solution is measured. The substrate is removed from the etching solution as soon as the diffusion current passes through a steep drop for the second time and assumes a constant value.