The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 1990
Filed:
Dec. 15, 1989
Applicant:
Inventors:
Charles W Lin, Austin, TX (US);
Ian Y Yee, Austin, TX (US);
Assignee:
Microelectronics and Computer Technology Corporation, Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F / ; B44C / ; C09K / ; C03C / ;
U.S. Cl.
CPC ...
156666 ; 156656 ; 1566591 ; 156901 ; 252 791 ; 252 794 ;
Abstract
A process and solution for selectively etching copper. The etching is effected by a nonaqueous solution of dimethyl sulfoxide and a halocarbon compound.