The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 1990
Filed:
Apr. 28, 1989
Akinori Mogami, Tokyo, JP;
Motohiro Naitoh, Tokyo, JP;
Jeol Ltd., Tokyo, JP;
Abstract
There is disclosed a direct imaging type SIMS (secondary ion mass spectrometry) instrument having a mass analyzer comprising superimposed fields. The superimposed fields consist of a toroidal electric field and a uniform magnetic field substantially perpendicular to the electric field. In an imaging mode, and ion image of the region of a sample which is irradiated with a primary beam is focused onto a two-dimensional ion detector by the mass analyzer having the superimposed fields. In TOF (time-of-flight) mass spectrometric mode, the intensity of the magnetic field of the superimposed fields is reduced down to zero to use only the electric field. Pulsed secondary ions from the surface of the sample are passed through the electric field and are separated according to mass with the lapse of time on the principle of TOF mass spectrometry.