The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 1990
Filed:
Mar. 25, 1988
Applicant:
Inventors:
Stephen T Tso, Dallas, TX (US);
David L Bouldin, Allen, TX (US);
Mark R Calley, Dallas, TX (US);
Charlotte M Tipton, Allen, TX (US);
Assignee:
Texas Instruments, Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C03C / ; C23F / ; C09K / ;
U.S. Cl.
CPC ...
156653 ; 156656 ; 156657 ; 252 791 ; 252 792 ;
Abstract
A capped silicide process which prevents reactions between the siliciding metal and oxygen contaminants and prevents silicon outdiffusion. In one form the process entails formation of a cap layer over the metal layer prior to performing the silicide reaction and subsequent removal of the cap layer with an isotropic etchant that does not degrade the underlying silicide.