The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 1990
Filed:
Mar. 23, 1988
Applicant:
Inventor:
Masafumi Shimbo, Tokyo, JP;
Assignee:
Seiko Instruments Inc., , JP;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437 41 ; 437 34 ; 437 57 ; 437162 ; 437193 ; 437913 ; 437 44 ; 437200 ; 357 239 ; 357 42 ; 357 59 ;
Abstract
The present invention provides a fabrication method of miniature insulated gate semiconductor devices such as MOS and CMOS in which their gates are formed by self-alignment, and in addition, provision of lightly doped drain (LDD) structure is easy. Therefore the present invention is extremely effective in the fabrication of miniature semiconductor devices which can be highly integrated and can operate at high speed.