The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 1990
Filed:
Dec. 15, 1988
Pierre Jeuch, Seyssins, FR;
Jean-Jacques Niez, Grenoble, FR;
Commissariat a l'energie Atomique, Paris, FR;
Abstract
A process for the production of a MIS transistor with a rising substrate/gate dielectric interface wall wherein on the surface of a semiconductor substrate having a given doping type is formed a first electrically insulating layer surrounding a zone of the substrate surface. On the first insulating layer and on said zone is formed a second layer. Part of that zone is made to appear by eliminating a fragment of the second layer, which fragment extends above that part, which thus constitutes the bottom of a hole made in the second layer and above part of the first insulating layer. A cavity is formed having at least one rising wall in the bottom of the hole. A third electrically insulating layer is formed on the surface of the aforesaid zone part. On the thus treated surface is formed an electrically conductive layer which eliminated, except in a zone corresponding to the fragment, so as to obtain a transistor gate. The remainder of the second layer is eliminated and the transistor source and drain zones are formed, the drain zone being located on the side of the rising wall.