The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 1990
Filed:
Jun. 01, 1988
Nobuyuki Akiyama, Yokohama, JP;
Yoshihiko Yamauchi, Yokohama, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
The present invention is of an apparatus, in a reduction-projection exposure apparatus, for reduction-projection position detection comprising illuminating means for illuminating a registration mark on a specimen with three or four wavelengths of laser beams oscillated in an Ar laser and one or two wavelengths, which are different from the aforesaid wavelengths, of laser beams oscillated in a He-Ne laser passed through a reduction-projection lens, an image forming optical system condensing, through the reductio-projection lens, reflected beams from the the registration mark on the specimen illuminated by the illuminating means and separating the beams into beams of four wavelengths, at least, out of the aforesaid wavelengths, for forming images of the separated beams, and image pick-up means for picking up the images, formed by the image forming optical system, of the registration mark on the specimen, thereby to detect the position of the registration mark, and of a relative method thereto.