The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 1990
Filed:
Jan. 06, 1989
Eberhard Schultheiss, Herborn, DE;
Peter Wirz, Waldernbach, DE;
Leybold Aktiengesellschaft, , DE;
Abstract
A method and apparatus for fabricating magneto-optical, storable, and/or deletable data carriers. One or more layers, each comprising two or more different chemical materials, are applied on a substrate (4) by means of a magnetron sputtering system (1). The fractional composition of each layer is controlled by changing the strength of the magnetic field produced by the magnetron system (1). By means of a suitable measuring device (51, 58) the compensation temperature of a particular layer is measured and compared with a desired value. If the measured compensation temperature differs from the desired value, the desired value can be attained by adjusting the cathode voltage U.sub.K of the magnetron system. A controller (63) is provided for controlling the cathode voltage and adjusting the distance between the magnetron system's target (6) and magnets (8, 9, 10).