The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 1990
Filed:
Dec. 08, 1988
Applicant:
Inventors:
Hilmar von Campe, Bad Homburg, DE;
Dietmar Liedtke, Nidderau, DE;
Berthold Schum, Biebergemund, DE;
WoJorg, Grobkrotzenburg, DE;
Assignee:
Nukem GmbH, Main, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D / ; C23C / ; C23C / ;
U.S. Cl.
CPC ...
427 38 ; 118723 ; 118 501 ;
Abstract
A method and a device are proposed for formation of a layer on a surface of a substrate by plasma-chemical process, where the surface is aligned parallel to the electrical field required for the plasma-chemical process. In addition, the gas required therefor flows directly onto the surface.