The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 1989
Filed:
Dec. 16, 1987
Applicant:
Inventors:
Yasuhiro Ikeda, Annaka, JP;
Kouji Mizuishi, Annaka, JP;
Assignee:
Shin-Etsu Handotai Co., Ltd., Gunma, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B / ; C30B / ; C30B / ;
U.S. Cl.
CPC ...
422250 ; 1566207 ; 15662073 ; 15662074 ; 2484062 ; 248184 ; 108102 ; 108143 ; 108157 ;
Abstract
A supporting apparatus for a semiconductor noncrystal rod comprises a movable ring adapted to move freely in horizontal directions unless it is engaged with the monocrystal rod, a lock means to prevent the movable ring from horizontally moving, and a drive means to elevate the movable ring.