The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 14, 1989

Filed:

Jun. 01, 1988
Applicant:
Inventors:

Masato Yoshikawa, Kodaira, JP;

Yukihiro Kusano, Tokorozawa, JP;

Kazuo Naito, Kawasaki, JP;

Toshio Honda, Akigawa, JP;

Tomonobu Hata, Kanazawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419212 ; 20419215 ; 204298 ;
Abstract

A substrate is surface treated by a sputtering process by placing the substrate between a pair of targets which are located at a predetermined spacing in a sputtering apparatus, driving atoms out of both the targets, and depositing the atoms on the substrate to form a film thereon.


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