The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 1989
Filed:
Nov. 28, 1988
Applicant:
Inventor:
Christopher C Day, Newtonville, MA (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D / ;
U.S. Cl.
CPC ...
137486 ; 1374875 ;
Abstract
A fluid flow control apparatus including a fluid flow control valve, a fluid flow sensor, and a fluid flow control circuit receiving a signal from the fluid flow sensor and outputting a signal to the fluid flow control valve. The fluid flow control circuit including an actual control circuit which outputs a signal related to the comparison of an actual flow signal and a desired flow signal, a desired flow comparator circuit which outputs a signal based on the comparison of the desired flow signal with a desired flow threshold signal, and a summing circuit which receives the outputs and provides a control signal based on these outputs.