The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 1989
Filed:
Dec. 27, 1988
Applicant:
Inventors:
Jay D Barnett, Mountain Home, ID (US);
Bryan J Ludwig, Meridian, ID (US);
Ernest E Marks, Boise, ID (US);
Scott E Moore, Boise, ID (US);
Assignee:
Micron Technology Inc., Boise, ID (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
738665 ; 134113 ;
Abstract
Apparatus to enclose a resistivity probe, to be used with a semiconductor wafer washer. Said apparatus is detachable and easy to maintain; is made of readily available and inexpensive plumbing parts; substantially encloses said probe, reducing contamination; allows nitrogen purge of said probe, keeping it clean; fully submerges said probe in discharge fluid, improving measurement accuracy; and is compact enough to allow washers to be triple stacked.