The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 1989
Filed:
Jun. 22, 1987
Applicant:
Inventors:
Marcel P Gaudreau, Lexington, MA (US);
Donald K Smith, Arlington, MA (US);
Assignee:
Applied Science & Technology, Inc., Woburn, MA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
31511121 ; 315 39 ; 156643 ;
Abstract
A microwave plasma generator for producing an axisymmetric plasma, having a waveguide apparatus, means for introducing a microwave source into the waveguide apparatus, and means for generating a circular axisymmetric microwave field from the microwave source. There are means for tuning the field to match the impedance of a plasma load. Further included is a vacuum chamber for containing a gas to be ionized to form the plasma, means for introducing this gas into the vacuum chamber, and means for coupling the microwave field to the vacuum chamber to form the plasma.